Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9448477 | Actinic ray-sensitive or radiation-sensitive resin composition, resist film, pattern forming method, manufacturing method of electronic device using the same, and electronic device | Hideaki Tsubaki, Hiroo Takizawa | 2016-09-20 |
| 9443793 | Semiconductor device | Hiroki Yamashita, Takashi Yui, Kiyomi Hagihara, Kenji Yokoyama | 2016-09-13 |
| 9235116 | Actinic-ray- or radiation sensitive resin composition, actinic-ray- or radiation-sensitive film therefrom and method of forming pattern | Takeshi Inasaki, Tomotaka Tsuchimura | 2016-01-12 |