Issued Patents 2016
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9488911 | Photosensitive composition, photocurable composition, chemical amplification resist composition, resist film, pattern forming method, method of manufacturing electronic device and electronic device | Kyouhei Sakita | 2016-11-08 |
| 9400430 | Actinic-ray- or radiation-sensitive resin composition, actinic-ray- or radiation-sensitive film, mask blank and method of forming pattern | Hiroo Takizawa | 2016-07-26 |
| 9285679 | Actinic ray-sensitive or radiation-sensitive composition, and resist film, resist-coated mask blanks, resist pattern forming method and photomask each using the composition | Takuya TSURUTA, Takeshi Inasaki, Koutarou Takahashi | 2016-03-15 |
| 9235116 | Actinic-ray- or radiation sensitive resin composition, actinic-ray- or radiation-sensitive film therefrom and method of forming pattern | Takeshi Inasaki, Takeshi Kawabata | 2016-01-12 |
| 9235120 | Negative actinic ray-sensitive or radiation-sensitive resin composition, resist film using the same, resist-coated mask blanks, resist pattern forming method, and photomask | Takeshi Inasaki | 2016-01-12 |