Issued Patents 2016
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9448490 | EUV lithography system | Udo Dinger, Lars Wischmeier, Stephan Kellner, Igor Gurevich, Markus Deguenther | 2016-09-20 |
| 9442397 | Device for controlling temperature of an optical element | — | 2016-09-13 |
| 9316929 | EUV exposure apparatus with reflective elements having reduced influence of temperature variation | Norman Baer, Ulrich Loering, Oliver Natt, Gero Wittich, Timo Laufer +7 more | 2016-04-19 |
| 9298101 | Multi facet mirror of a microlithographic projection exposure apparatus | Thorsten Rassel | 2016-03-29 |