Issued Patents 2011
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8039179 | Integrated circuit layout design | Ming-Feng Shieh, Anthony Yen, Shao-Ming Yu, Chang-Yun Chang, Jeff J. Xu +1 more | 2011-10-18 |
| 8027529 | System for improving critical dimension uniformity | Chih-Ming Ke, Jacky Huang, Chun-Kuang Chen, Tsai-Sheng Gau | 2011-09-27 |
| 7989355 | Method of pitch halving | Ming-Feng Shieh, Anthony Yen, Ming-Ching Chang, Jeff J. Xu | 2011-08-02 |
| 7924401 | Seal ring arrangements for immersion lithography systems | Burn Jeng Lin, Tsai-Sheng Gau, Chun-Kuang Chen, Ru-Gun Liu, Jen-Chieh Shih | 2011-04-12 |
| 7897297 | Method and system for optimizing intra-field critical dimension uniformity using a sacrificial twin mask | Chih-Ming Ke, Tsai-Sheng Gau, Hung-Chang Hsieh | 2011-03-01 |
| 7862962 | Integrated circuit layout design | Ming-Feng Shieh, Anthony Yen, Shao-Ming Yu, Chang-Yun Chang, Jeff J. Xu +1 more | 2011-01-04 |