Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8053323 | Patterning methodology for uniformity control | Yu-Chao Lin, Yih-Ann Lin, Ryan Chia-Jen Chen, Chao-Cheng Chen | 2011-11-08 |
| 7989355 | Method of pitch halving | Ming-Feng Shieh, Shinn-Sheng Yu, Anthony Yen, Jeff J. Xu | 2011-08-02 |