Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8027529 | System for improving critical dimension uniformity | Shinn-Sheng Yu, Chih-Ming Ke, Jacky Huang, Tsai-Sheng Gau | 2011-09-27 |
| 7935477 | Double patterning strategy for contact hole and trench | Feng-Cheng Hsu | 2011-05-03 |
| 7924401 | Seal ring arrangements for immersion lithography systems | Burn Jeng Lin, Tsai-Sheng Gau, Ru-Gun Liu, Shinn-Sheng Yu, Jen-Chieh Shih | 2011-04-12 |