Issued Patents 2011
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8039195 | Si device making method by using a novel material for packing and unpacking process | Hsiao-Wei Yeh | 2011-10-18 |
| 8029969 | Material and method for photolithography | Hsiao-Wei Yeh, Jian-Hong Chen | 2011-10-04 |
| 7972957 | Method of making openings in a layer of a semiconductor device | Bang-Chein Ho, Jian-Hong Chen | 2011-07-05 |
| 7948096 | Semiconductor using specific contact angle for immersion lithography | Bang-Ching Ho | 2011-05-24 |
| 7924401 | Seal ring arrangements for immersion lithography systems | Burn Jeng Lin, Tsai-Sheng Gau, Chun-Kuang Chen, Ru-Gun Liu, Shinn-Sheng Yu | 2011-04-12 |