Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8048616 | Double patterning strategy for contact hole and trench in photolithography | Feng-Cheng Hsu | 2011-11-01 |
| 8029969 | Material and method for photolithography | Hsiao-Wei Yeh, Jen-Chieh Shih | 2011-10-04 |
| 7972957 | Method of making openings in a layer of a semiconductor device | Bang-Chein Ho, Jen-Chieh Shih | 2011-07-05 |