Issued Patents 2011
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8038897 | Method and system for wafer inspection | Chang-Cheng Hung | 2011-10-18 |
| 8027529 | System for improving critical dimension uniformity | Shinn-Sheng Yu, Chih-Ming Ke, Jacky Huang, Chun-Kuang Chen | 2011-09-27 |
| 7934177 | Method and system for a pattern layout split | Jaw-Jung Shin, King-Chang Shu, Burn Jeng Lin | 2011-04-26 |
| 7924401 | Seal ring arrangements for immersion lithography systems | Burn Jeng Lin, Chun-Kuang Chen, Ru-Gun Liu, Shinn-Sheng Yu, Jen-Chieh Shih | 2011-04-12 |
| 7897297 | Method and system for optimizing intra-field critical dimension uniformity using a sacrificial twin mask | Chih-Ming Ke, Shinn-Sheng Yu, Hung-Chang Hsieh | 2011-03-01 |