Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8027529 | System for improving critical dimension uniformity | Shinn-Sheng Yu, Jacky Huang, Chun-Kuang Chen, Tsai-Sheng Gau | 2011-09-27 |
| 7897297 | Method and system for optimizing intra-field critical dimension uniformity using a sacrificial twin mask | Tsai-Sheng Gau, Shinn-Sheng Yu, Hung-Chang Hsieh | 2011-03-01 |