Issued Patents 2011
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7974728 | System for extraction of key process parameters from fault detection classification to enable wafer prediction | Chun-Hsien Lin, Francis Ko, Kewei Zuo, Henry Lo | 2011-07-05 |
| 7956448 | Stacked structures and methods of fabricating stacked structures | Chen-Hua Yu, Wen-Chih Chiou, Weng-Jin Wu | 2011-06-07 |
| 7951723 | Integrated etch and supercritical CO2 process and chamber design | Ching-Ya Wang, Weng-Jin Wu, Henry Lo | 2011-05-31 |
| 7891536 | PVD target with end of service life detection capability | Yi-Li Hsiao, Chen-Hua Yu, Lawrance Sheu | 2011-02-22 |
| 7879711 | Stacked structures and methods of fabricating stacked structures | Chen-Hua Yu, Wen-Chih Chiou, Weng-Jin Wu | 2011-02-01 |