Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7974728 | System for extraction of key process parameters from fault detection classification to enable wafer prediction | Chun-Hsien Lin, Francis Ko, Kewei Zuo, Jean Wang | 2011-07-05 |
| 7951723 | Integrated etch and supercritical CO2 process and chamber design | Ching-Ya Wang, Weng-Jin Wu, Jean Wang | 2011-05-31 |
| 7928549 | Integrated circuit devices with multi-dimensional pad structures | Hai-Ching Chen, Harold C. H. Hsiung | 2011-04-19 |