Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8030210 | Contact barrier structure and manufacturing methods | Chung-Hu Ke, Wen-Chin Lee | 2011-10-04 |
| 7951723 | Integrated etch and supercritical CO2 process and chamber design | Weng-Jin Wu, Henry Lo, Jean Wang | 2011-05-31 |