Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7918251 | Substrate carrier and facility interface and apparatus including same | Chen-Hua Yu | 2011-04-05 |
| 7891536 | PVD target with end of service life detection capability | Chen-Hua Yu, Jean Wang, Lawrance Sheu | 2011-02-22 |