Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8021594 | Preserving filled features when vacuum wiping | Steven C. Shackleton, Pankaj Lad, Frank Y. Xu, Sidlgata V. Sreenivasan | 2011-09-20 |
| 8012395 | Template having alignment marks formed of contrast material | Kosta S. Selinidis, Byung-Jin Choi, Gerard Schmid, Ecron D. Thompson | 2011-09-06 |
| 7981481 | Method for controlling distribution of fluid components on a body | Frank Y. Xu, Pankaj Lad, Michael Watts | 2011-07-19 |
| 7939131 | Method to provide a layer with uniform etch characteristics | Frank Y. Xu, Christopher J. Mackay, Pankaj Lad, Van Nguyen Truskett, Wesley D. Martin +4 more | 2011-05-10 |