Issued Patents 2011
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8075299 | Reduction of stress during template separation | Frank Y. Xu | 2011-12-13 |
| 8066930 | Forming a layer on a substrate | Michael Watts | 2011-11-29 |
| 8057725 | Capillary imprinting technique | Byung-Jin Choi | 2011-11-15 |
| 8033814 | Device for holding a template for use in imprint lithography | Todd C. Bailey, Byung-Jin Choi, Matthew E. Colburn, Carlton G. Willson, John Ekerdt | 2011-10-11 |
| 8021594 | Preserving filled features when vacuum wiping | Steven C. Shackleton, Pankaj Lad, Ian McMackin, Frank Y. Xu | 2011-09-20 |
| 8016277 | Flexure based macro motion translation stage | Byung-Jin Choi | 2011-09-13 |
| 8012394 | Template pattern density doubling | — | 2011-09-06 |
| 7947608 | Positive tone bi-layer method | — | 2011-05-24 |
| 7943081 | Step and repeat imprint lithography processes | Byung-Jin Choi, Norman E. Schumaker, Ronald D. Voisin, Michael Watts, Mario Johannes Meissl | 2011-05-17 |
| 7935292 | Imprinting of partial fields at the edge of the wafer | Byung-Jin Choi | 2011-05-03 |
| 7927541 | Full-wafer or large area imprinting with multiple separated sub-fields for high throughput lithography | — | 2011-04-19 |
| 7910042 | Capillary imprinting technique | Byung-Jin Choi | 2011-03-22 |