Issued Patents 2011
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8076386 | Materials for imprint lithography | Michael Watts, Nicholas A. Stacey | 2011-12-13 |
| 8075299 | Reduction of stress during template separation | Sidlgata V. Sreenivasan | 2011-12-13 |
| 8021594 | Preserving filled features when vacuum wiping | Steven C. Shackleton, Pankaj Lad, Ian McMackin, Sidlgata V. Sreenivasan | 2011-09-20 |
| 7981481 | Method for controlling distribution of fluid components on a body | Ian McMackin, Pankaj Lad, Michael Watts | 2011-07-19 |
| 7939131 | Method to provide a layer with uniform etch characteristics | Christopher J. Mackay, Pankaj Lad, Ian McMackin, Van Nguyen Truskett, Wesley D. Martin +4 more | 2011-05-10 |
| 7906180 | Composition for an etching mask comprising a silicon-containing material | Michael Nevin Miller, Michael Watts | 2011-03-15 |
| 7874831 | Template having a silicon nitride, silicon carbide or silicon oxynitride film | Douglas J. Resnick, Mario Johannes Meissl, Kosta S. Selinidis | 2011-01-25 |