Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8012395 | Template having alignment marks formed of contrast material | Byung-Jin Choi, Gerard Schmid, Ecron D. Thompson, Ian McMackin | 2011-09-06 |
| 7874831 | Template having a silicon nitride, silicon carbide or silicon oxynitride film | Douglas J. Resnick, Mario Johannes Meissl, Frank Y. Xu | 2011-01-25 |