Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7939131 | Method to provide a layer with uniform etch characteristics | Frank Y. Xu, Christopher J. Mackay, Pankaj Lad, Ian McMackin, Wesley D. Martin +4 more | 2011-05-10 |
| 7880872 | Interferometric analysis method for the manufacture of nano-scale devices | Pawan Kumar Nimmakayala, Tom H. Rafferty, Alireza Aghili, Byung-Jin Choi, Philip D. Schumaker +1 more | 2011-02-01 |