Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7880872 | Interferometric analysis method for the manufacture of nano-scale devices | Pawan Kumar Nimmakayala, Tom H. Rafferty, Byung-Jin Choi, Philip D. Schumaker, Daniel Babbs +1 more | 2011-02-01 |