Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8033815 | Chucking system for nano-manufacturing | Byung-Jin Choi, Anshuman Cherala | 2011-10-11 |
| 7880872 | Interferometric analysis method for the manufacture of nano-scale devices | Pawan Kumar Nimmakayala, Tom H. Rafferty, Alireza Aghili, Byung-Jin Choi, Philip D. Schumaker +1 more | 2011-02-01 |