Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8033813 | Chucking system comprising an array of fluid chambers | Anshuman Cherala, Byung-Jin Choi, Steven C. Shackleton | 2011-10-11 |
| 8021594 | Preserving filled features when vacuum wiping | Steven C. Shackleton, Ian McMackin, Frank Y. Xu, Sidlgata V. Sreenivasan | 2011-09-20 |
| 7981481 | Method for controlling distribution of fluid components on a body | Frank Y. Xu, Ian McMackin, Michael Watts | 2011-07-19 |
| 7939131 | Method to provide a layer with uniform etch characteristics | Frank Y. Xu, Christopher J. Mackay, Ian McMackin, Van Nguyen Truskett, Wesley D. Martin +4 more | 2011-05-10 |