Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7939131 | Method to provide a layer with uniform etch characteristics | Frank Y. Xu, Pankaj Lad, Ian McMackin, Van Nguyen Truskett, Wesley D. Martin +4 more | 2011-05-10 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7939131 | Method to provide a layer with uniform etch characteristics | Frank Y. Xu, Pankaj Lad, Ian McMackin, Van Nguyen Truskett, Wesley D. Martin +4 more | 2011-05-10 |