Issued Patents 2011
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8045179 | Bright and dark field scatterometry systems for line roughness metrology | Guorong V. Zhuang, Steven Russel Spielman, Leonid Poslavsky, Daniel Wack | 2011-10-25 |
| 7951672 | Measurement and control of strained devices | Daniel Wack, Ady Levy | 2011-05-31 |
| 7933016 | Apparatus and methods for detecting overlay errors using scatterometry | Walter D. Mieher, Ady Levy, Boris Golovanevsky, Michael Friedmann, Ian Smith +10 more | 2011-04-26 |
| 7928390 | Infrared metrology | Guorong V. Zhuang | 2011-04-19 |
| 7929667 | High brightness X-ray metrology | Guorong V. Zhuang | 2011-04-19 |