Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7933016 | Apparatus and methods for detecting overlay errors using scatterometry | Walter D. Mieher, Ady Levy, Boris Golovanevsky, Michael Friedmann, Michael Adel +10 more | 2011-04-26 |
| 7876440 | Apparatus and methods for detecting overlay errors using scatterometry | Walter D. Mieher, Ady Levy, Boris Golovanesky, Michael Friedmann, Michael Adel +1 more | 2011-01-25 |