Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7876440 | Apparatus and methods for detecting overlay errors using scatterometry | Walter D. Mieher, Ady Levy, Michael Friedmann, Ian Smith, Michael Adel +1 more | 2011-01-25 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7876440 | Apparatus and methods for detecting overlay errors using scatterometry | Walter D. Mieher, Ady Levy, Michael Friedmann, Ian Smith, Michael Adel +1 more | 2011-01-25 |