Issued Patents 2011
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8040511 | Azimuth angle measurement | Shankar Krishnan, Haixing Zhou, Haiming Wang, David Lidsky | 2011-10-18 |
| 7933016 | Apparatus and methods for detecting overlay errors using scatterometry | Ady Levy, Boris Golovanevsky, Michael Friedmann, Ian Smith, Michael Adel +10 more | 2011-04-26 |
| 7879627 | Overlay marks and methods of manufacturing such marks | Mark Ghinovker, Michael Adel, Ady Levy, Dan Wack | 2011-02-01 |
| 7876440 | Apparatus and methods for detecting overlay errors using scatterometry | Ady Levy, Boris Golovanesky, Michael Friedmann, Ian Smith, Michael Adel +1 more | 2011-01-25 |
| 7867693 | Methods for forming device structures on a wafer | — | 2011-01-11 |