Issued Patents 2011
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8023110 | Priori crack detection in solar photovoltaic wafers by detecting bending at edges of wafers | Samuel Ngai | 2011-09-20 |
| 7989729 | Detecting and repairing defects of photovoltaic devices | Guoheng Zhao, George H. Zapalac, Jr., Samuel Ngai, Mehdi Vaez-Iravani | 2011-08-02 |
| 7951672 | Measurement and control of strained devices | Daniel Wack, John Fielden | 2011-05-31 |
| 7933016 | Apparatus and methods for detecting overlay errors using scatterometry | Walter D. Mieher, Boris Golovanevsky, Michael Friedmann, Ian Smith, Michael Adel +10 more | 2011-04-26 |
| 7879627 | Overlay marks and methods of manufacturing such marks | Mark Ghinovker, Michael Adel, Walter D. Mieher, Dan Wack | 2011-02-01 |
| 7876440 | Apparatus and methods for detecting overlay errors using scatterometry | Walter D. Mieher, Boris Golovanesky, Michael Friedmann, Ian Smith, Michael Adel +1 more | 2011-01-25 |