Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8045179 | Bright and dark field scatterometry systems for line roughness metrology | Guorong V. Zhuang, Steven Russel Spielman, Leonid Poslavsky, John Fielden | 2011-10-25 |
| 7951672 | Measurement and control of strained devices | Ady Levy, John Fielden | 2011-05-31 |