Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8045179 | Bright and dark field scatterometry systems for line roughness metrology | Steven Russel Spielman, Leonid Poslavsky, Daniel Wack, John Fielden | 2011-10-25 |
| 7928390 | Infrared metrology | John Fielden | 2011-04-19 |
| 7929667 | High brightness X-ray metrology | John Fielden | 2011-04-19 |