Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8045179 | Bright and dark field scatterometry systems for line roughness metrology | Guorong V. Zhuang, Steven Russel Spielman, Daniel Wack, John Fielden | 2011-10-25 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8045179 | Bright and dark field scatterometry systems for line roughness metrology | Guorong V. Zhuang, Steven Russel Spielman, Daniel Wack, John Fielden | 2011-10-25 |