Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8045786 | Waferless recipe optimization | Amir Widmann, Dror Francis | 2011-10-25 |
| 7933016 | Apparatus and methods for detecting overlay errors using scatterometry | Walter D. Mieher, Ady Levy, Boris Golovanevsky, Michael Friedmann, Ian Smith +10 more | 2011-04-26 |
| 7879627 | Overlay marks and methods of manufacturing such marks | Michael Adel, Walter D. Mieher, Ady Levy, Dan Wack | 2011-02-01 |
| 7876438 | Apparatus and methods for determining overlay and uses of same | Michael Adel, Jorge Poplawski, Joel Seligson | 2011-01-25 |