Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8045786 | Waferless recipe optimization | Mark Ghinovker, Dror Francis | 2011-10-25 |
| 7925486 | Computer-implemented methods, carrier media, and systems for creating a metrology target structure design for a reticle layout | Mark D. Smith, Robert Hardister, Mike Pochkowski, Elyakim Kassel, Mike Adel | 2011-04-12 |