Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7925486 | Computer-implemented methods, carrier media, and systems for creating a metrology target structure design for a reticle layout | Mark D. Smith, Robert Hardister, Amir Widmann, Elyakim Kassel, Mike Adel | 2011-04-12 |