Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8040511 | Azimuth angle measurement | Haixing Zhou, Haiming Wang, David Lidsky, Walter D. Mieher | 2011-10-18 |
| 7907264 | Measurement of thin film porosity | — | 2011-03-15 |
| 7869040 | Measurement systems configured to perform measurements of a specimen and illumination subsystems configured to provide illumination for a measurement system | Hidong Kwak, Shing Lee, Haixing Zou | 2011-01-11 |