Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7869040 | Measurement systems configured to perform measurements of a specimen and illumination subsystems configured to provide illumination for a measurement system | Shankar Krishnan, Shing Lee, Haixing Zou | 2011-01-11 |