Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7985958 | Electron beam drawing apparatus, deflection amplifier, deflection control device, electron beam drawing method, method of manufacturing semiconductor device, and electron beam drawing program | Tetsuro Nakasugi, Kazuo Tawarayama, Hiroyuki Mizuno, Takumi Ota, Noriaki Sasaki +2 more | 2011-07-26 |
| 7968272 | Semiconductor device manufacturing method to form resist pattern | Daisuke Kawamura, Eishi Shiobara, Tomoyuki Takeishi, Kei Hayasaki, Yasunobu Onishi +1 more | 2011-06-28 |
| 7952071 | Apparatus and method for inspecting sample surface | Nobuharu Noji, Yoshihiko Naito, Hirosi Sobukawa, Masahiro Hatakeyama, Kenji Terao +2 more | 2011-05-31 |