Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8067757 | Extreme ultraviolet light source apparatus and method of adjusting the same | — | 2011-11-29 |
| 8023759 | Focus monitoring method | — | 2011-09-20 |
| 7985958 | Electron beam drawing apparatus, deflection amplifier, deflection control device, electron beam drawing method, method of manufacturing semiconductor device, and electron beam drawing program | Tetsuro Nakasugi, Hiroyuki Mizuno, Takumi Ota, Noriaki Sasaki, Tatsuhiko Higashiki +2 more | 2011-07-26 |