Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7985958 | Electron beam drawing apparatus, deflection amplifier, deflection control device, electron beam drawing method, method of manufacturing semiconductor device, and electron beam drawing program | Kazuo Tawarayama, Hiroyuki Mizuno, Takumi Ota, Noriaki Sasaki, Tatsuhiko Higashiki +2 more | 2011-07-26 |
| 7889910 | Character pattern extracting method, charged particle beam drawing method, and character pattern extracting program | Takumi Ota, Takeshi Koshiba, Noriaki Sasaki | 2011-02-15 |