Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8048325 | Method and apparatus for multilayer photoresist dry development | Vaidyanathan Balasubramaniam, Koichiro Inazawa, Rie Inazawa, Rich Wise, Arpan Mahorawala | 2011-11-01 |
| 7977185 | Method and apparatus for post silicide spacer removal | Brian J. Greene, Chung Woh Lai, Yong Meng Lee, Wenhe Lin, Kern Rim +1 more | 2011-07-12 |
| 7863197 | Method of forming a cross-section hourglass shaped channel region for charge carrier mobility modification | Huajie Chen, Dureseti Chidambarrao, Judson R. Holt, Qiqing C. Ouyang | 2011-01-04 |