Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7999325 | Method to remove spacer after salicidation to enhance contact etch stop liner stress on MOS | Young Way Teh, Yong Meng Lee, Chung Woh Lai, Khee Yong Lim, Wee Leng Tan +3 more | 2011-08-16 |
| 7993997 | Poly profile engineering to modulate spacer induced stress for device enhancement | Vincent Ho, Young Way Teh, Yong Kong Siew, Bei Chao Zhang, Fan Zhang +2 more | 2011-08-09 |
| 7977185 | Method and apparatus for post silicide spacer removal | Brian J. Greene, Chung Woh Lai, Yong Meng Lee, Siddhartha Panda, Kern Rim +1 more | 2011-07-12 |