Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8048325 | Method and apparatus for multilayer photoresist dry development | Vaidyanathan Balasubramaniam, Koichiro Inazawa, Rich Wise, Arpan Mahorawala, Siddhartha Panda | 2011-11-01 |