Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8034532 | High contact angle topcoat material and use thereof in lithography process | Robert David Allen, Phillip Brock, Carl E. Larson, Ratnam Sooriyakumaran, Linda Karin Sundberg | 2011-10-11 |
| 7951525 | Low outgassing photoresist compositions | Richard Anthony DiPietro, Ratnam Sooriyakumaran, Sally A. Swanson | 2011-05-31 |
| 7883828 | Functionalized carbosilane polymers and photoresist compositions containing the same | Robert David Allen, Matthew E. Colburn, Daniel P. Sanders, Ratnam Sooriyakumaran | 2011-02-08 |