Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8058219 | Metals compatible post-etch photoresist remover and/or sacrificial antireflective coating etchant | Melissa K. Rath, David Bernhard, Thomas H. Baum, Ping Jiang, Michael B. Korzenski | 2011-11-15 |
| 8026200 | Low pH mixtures for the removal of high density implanted resist | Emanuel I. Cooper, Julie Cissell, Michael B. Korzenski, George G. Totir, Mahmoud Khojasteh | 2011-09-27 |
| 7955519 | Composition and method for planarizing surfaces | Yuchun Wang, Jason Aggio, Bin Lu, John Parker | 2011-06-07 |