Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8058219 | Metals compatible post-etch photoresist remover and/or sacrificial antireflective coating etchant | David Bernhard, Thomas H. Baum, Ping Jiang, Renjie Zhou, Michael B. Korzenski | 2011-11-15 |
| 7994108 | Composition useful for removal of post-etch photoresist and bottom anti-reflection coatings | David W. Minsek, Weihua Wang, David Bernhard, Thomas H. Baum | 2011-08-09 |