Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8058219 | Metals compatible post-etch photoresist remover and/or sacrificial antireflective coating etchant | Melissa K. Rath, David Bernhard, Thomas H. Baum, Renjie Zhou, Michael B. Korzenski | 2011-11-15 |
| 7960328 | Composition and method for recycling semiconductor wafers having low-k dielectric materials thereon | Pamela M. Visintin, Michael B. Korzenski, Mackenzie King | 2011-06-14 |