Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8058219 | Metals compatible post-etch photoresist remover and/or sacrificial antireflective coating etchant | Melissa K. Rath, David Bernhard, Thomas H. Baum, Ping Jiang, Renjie Zhou | 2011-11-15 |
| 8026200 | Low pH mixtures for the removal of high density implanted resist | Emanuel I. Cooper, Julie Cissell, Renjie Zhou, George G. Totir, Mahmoud Khojasteh | 2011-09-27 |
| 7960328 | Composition and method for recycling semiconductor wafers having low-k dielectric materials thereon | Pamela M. Visintin, Ping Jiang, Mackenzie King | 2011-06-14 |
| 7922824 | Oxidizing aqueous cleaner for the removal of post-etch residues | David W. Minsek, Martha M. Rajaratnam | 2011-04-12 |