Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7994059 | Enhanced stress transfer in an interlayer dielectric by using an additional stress layer above a dual stress liner in a semiconductor device | Ralf Richter, Martin Gerhardt, Joerg Hohage | 2011-08-09 |
| 7981740 | Enhanced cap layer integrity in a high-K metal gate stack by using a hard mask for offset spacer patterning | Markus Lenski, Kerstin Ruttloff, Frank Seliger, Ralf Otterbach | 2011-07-19 |
| 7938973 | Arc layer having a reduced flaking tendency and a method of manufacturing the same | Ralf Richter, Joerg Hohage | 2011-05-10 |
| 7887978 | Method of detecting repeating defects in lithography masks on the basis of test substrates exposed under varying conditions | Uwe Griebenow, Wolfram Grundke, Andre Poock | 2011-02-15 |