Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7981740 | Enhanced cap layer integrity in a high-K metal gate stack by using a hard mask for offset spacer patterning | Markus Lenski, Kerstin Ruttloff, Martin Mazur, Frank Seliger | 2011-07-19 |
| 7977179 | Dopant profile tuning for MOS devices by adapting a spacer width prior to implantation | Anthony Mowry, Markus Lenski, Guido Koerner | 2011-07-12 |