Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7981740 | Enhanced cap layer integrity in a high-K metal gate stack by using a hard mask for offset spacer patterning | Markus Lenski, Kerstin Ruttloff, Martin Mazur, Ralf Otterbach | 2011-07-19 |
| 7951677 | Corner rounding in a replacement gate approach based on a sacrificial fill material applied prior to work function metal deposition | Jens Heinrich, Thomas Werner, Frank Richter | 2011-05-31 |